Structural Properties Of Si:H Thin Fılm Grown By VHF- PEDVD
Keywords: VHF-PECVD, hydrogenated silicon thin film, Raman spectroscopy, FTIR
Article no: 51
Pages 515-523
Keywords: VHF-PECVD, hydrogenated silicon thin film, Raman spectroscopy, FTIR
Article no: 51
Pages 515-523